In-Vacuum & Cleanroom

NyeTorr®, NyeClean® and NyeVac® are chemically stable, non-toxic, low-vapor-pressure, synthetic lubricants designed for cleanroom and in-vacuum applications such as those found in the semiconductor and aerospace industries. These lubricants typically contain a PTFE thickener and a cyclopentane (MAC) or perfluoropolyether (PFPE) base oil which are well suited for wide temperature applications where exposure to harsh chemicals may be a concern.

These lubricants improve the performance of bearings, linear guides, ball and lead screws, and seals by:

  • Protecting against friction & wear
  • Preventing corrosion
  • Extending component life
  • Ensuring component reliability
  • Preventing contamination
  • Controlling precision motion

PFPE vs MAC lubricants

The NyeClean® product line consists of PFPE chemistries while the NyeTorr® product line consists of both PFPE and MAC chemistries. Both PFPE and MAC lubricants are recommended for vacuum environments because of their low vapor pressures and low outgassing properties. PFPE lubricants offer better high temperature performance (up to 250 °C) when compared to MAC lubricants (up to 150 °C). Additionally, PFPE lubricants offer inherent chemical inertness, which translates to unsurpassed resistance to oxidation and hydrolytic degradation, and provides excellent elastomer compatibility. Due to their unique base oil chemistry and additive packages, MAC lubricants provide superior wear protection and bearing life performance. Most MAC and PFPE products are ultrafiltered. NyeTorr® and NyeClean products comply with PFOA regulations.

NyeTorr® lubricants are recommended for applications operating under high vacuum and high temperature where contamination is a concern. NyeTorr® base oils are processed to offer the lowest outgassing of any lubricant from Nye. To ensure low particle and low outgassing qualities, each lot is ultrafiltered and tested per ASTM E595 to ensure the products meet vacuum stability requirements.

PFPE Lubricants

ProductTypeKinematic
Viscosity
@ 40° C
Vacuum Stability
(ASTM E595)
Features
NYETORR 5300 Grease 140 cSt TML= 0.320 wt% CVCM= 0.045 wt% Industry standard PFPE vacuum grease.
NYETORR 5300XP Grease 140 cSt TML= 0.075 wt% CVCM= 0.018 wt% Offers improved wear performance in high load applications.
NYETORR 5350 Grease 152 cSt TML=0.757 wt% CVCM=0.451 wt% Suitable for low to moderate vacuum conditions with improved load and wear performance.
NYETORR 6300 Grease 188 cSt TML= 0.036 wt% CVCM= 0.006 wt% Significantly lower outgassing rates.
NYETORR 6300S Grease 188 cSt TML= 0.012 wt% CVCM= 0.000 wt% A soft grease used in applications that require lower viscous drag and torque resistance.
NYETORR 6350EL Grease 200 cSt TML = 0.060 wt% CVCM = 0.008 wt% Offers Lube-For-Life performance in applications that require low outgassing and low torque.
NYETORR 6370EL Grease 362 cSt TML= 0.063 wt% CVCM= 0.001 wt% Offers the longest life of any PFPE lubricant while providing superior corrosion and wear resistance.
NYETORR 5301 Oil 140 cSt TML= 0.230 wt% CVCM= 0.033 wt% Base oil used in NyeTorr® 5300.
NYETORR 6301 Oil 187 cSt TML= 0.00 wt% CVCM= 0.000 wt% Base oil used in NyeTorr® 6300.
NYETORR 5361 Oil 192 cSt TML= 0.03 wt% CVCM= 0.010 Base oil used in NyeClean® 5057.
NYETORR 6371 Oil 446 cSt TML= 0.020 wt% CVCM= 0.002 wt% Base oil used in NyeTorr® 6370EL.
NYETORR 5381 Oil 809 cSt TML= 0.070 wt% CVCM= 0.004 wt% Used as a grease replacement for static seals where a degree of damping is needed.

MAC Lubricants

ProductTypeKinematic
Viscosity
@ 40° C
Vacuum Stability
(ASTM E595)
Features
NYETORR 5200 Grease 108 cSt TML= 0.068 wt%
CVCM= 0.007 wt%
Superior torque and anti-wear performance to extend component life.
NYETORR 6200 Grease 108 cSt TML= 0.058 wt%
CVCM= 0.025 wt%
Superior outgassing and anti-wear performance.
NYETORR 6200-FL Grease 108 cSt TML=0.03 wt%
CVCM=0.007 wt%
Excellent torque performance in low-speed dithering operations.
NYETORR 5201 Oil 108 cSt TML= 0.120 wt%
CVCM= 0.013 wt%
Base oil used in NyeTorr® 5200.
NYETORR 6201 Oil 108 cSt TML= 0.110 wt%
CVCM= 0.010 wt%
Base oil used in NyeTorr® 6200.
NyeClean® lubricants are recommended for cleanroom or low vacuum applications such as those found in back-end semiconductor manufacturing. These lubricants offer good outgassing performance, although higher than what is found in NyeTorr® products, and excellent particle generation properties.
ProductTypeKinematic
Viscosity
@ 40° C
Vacuum Stability
(ASTM E595)
Features
NYECLEAN 5057 PFPE Grease 192 cSt TML= 0.225 wt%
CVCM= 0.054 wt%
Suggested alternative for discontinued legacy PFPE semiconductor greases.
NYECLEAN 5097R PFPE Grease 140 cSt TML= 0.441 wt%
CVCM= 0.044
Provides superior corrosion resistance and wear performance up to 180° C in environments where outgassing is not a concern
NyeVac® oils are recommended for bearings and other components found in vacuum and turbomolecular pumps. These ester-based oils offer good high temperature and wear performance.
ProductKinematic
Viscosity
@ 40° C
Vacuum Stability
(ASTM E595)
Features
NYEVAC 9720 61 cSt TML= 0.359 wt% CVCM= 0.023 wt% Ester oil used in turbomolecular pumps
NYEVAC 9721 61 cSt TML= 0.942 wt% CVCM= 0.467 wt% An ester grease thickened with lithium soap for turbomolecular vacuum pump systems.
NYEVAC 9724 61 cSt TML= 0.279 wt% CVCM= 0.073 wt% A very soft ester grease thickened with PTFE for turbo molecular vacuum pump systems.

Want to learn more or discuss lubrication solutions for your application? Contact Us.

 

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